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EVENT DATES
Sep 2016
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EXHIBITION HALL DATES
Sep 2016
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Venue

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SPIE Photomask Technology 2016

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Overview

Event Overview:

2016 Conference Topics


Mask Making:
Mask data preparation • Substrates, materials, pellicles • Patterning tools and processes • Resist and resist processing • Etch techniques • Metrology • Inspection • Repair • Cleaning, contamination, and haze • Simulation of mask making
Anamorphic Masks for High-NA EUV:
Lithograph, OPC, and SMO models • Magnification interactions • Impact of half-field reticles • Stitching for mask making/design
Emerging & Alternate Mask Technologies:
EUV mask making • EUV mask inspection and repair • EUV mask infrastructure • EUV mask application • Nanoimprint mask making • Nanoimprint mask application • Pixelated masks • Alternative mask technologies • Grey-scale masks • Direct-write, ML²
EUV pellicles:
Nanoimprint mask making • Nanoimprint mask applications • Pixelated masks • Alternative mask technologies • Grey-scale masks • Direct-write, ML² • Masks for flat panel displays • Masks for MEMs
Mask Business:
Mask manufacturing control • Reticle management in the fab and mask shop • Mask management in wafer fabs • Business aspects of masks • Infrastructure challenges

Exhibitor Information:

The SPIE Photomask Technology Exhibition, the mask-making industry's premier event. Join us as an exhibitor or walk the floor to meet key suppliers of mask components, software, and manufacturing equipment.

Join top companies showcasing these technologies:
 •     Mask technologies: Inspection/repair, Metrology, Cleaning
 •     Mask business
 •     EUV
 •     Nanoimprint
 •     Direct write
 •     Patterning
 •     Wafers
 •     Tools
 •     Simulation
 •     Resists and substrates
 •     Materials and etching

About SPIE:

SPIE is an international society advancing an interdisciplinary approach to the science and application of light.

The not-for-profit society advances emerging technologies through interdisciplinary information exchange, continuing education, publications, patent precedent, and career and professional growth.

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