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Event Overview:

SPIE Advanced Lithography, the premier conference for the lithography community. For 40 years, SPIE has brought together industry leaders to solve the latest challenges in lithography and patterning in the semiconductor industry.

Attendee Information:

Advanced Lithography Exhibition:

Come meet the industry's top semiconductor suppliers, integrators, and manufacturers. For 40 years SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications and the exhibition is where you can see the latest products and meet with the leaders in the field.

Featured Technologies:

Etch Technology for nanopatterning

Lithography: immersion, double patterning, e-beam, EUV, optical/laser, RET

Metrology, inspection, OPC, and process control

Design and manufacturing software

Materials and chemicals

Imaging equipment


Resist materials and processing


IC and chip fabrication

Nanoscale imaging

Exhibitor Information:

Exhibit at SPIE Advanced Lithography, 23-24 February 2016, the largest gathering of lithography experts in the world. For 39 years SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications.

Reach 2,300 lithography experts

Five days of presentations, courses, and special events, that offer opportunities for face-to-face interaction with potential customers

61 exhibiting companies in 2015

*San Jose Marriott

301 South Market Street / San Jose, California / 95113


Don't wait to register for the SPIE Advanced Lithography Exhibition 2016. You'll meet influential people and maximize your opportunities for success. Start now by accessing the information below.

All information in Events In America is deemed to be accurate at the time we add it, and we take steps to verify all details and update our records when new information is provided, but as people, events and circumstances change, we caution users to independently confirm all information. and Events In America LLC make no guarantee of accuracy and assume no liability for inaccurate information.

Conference/Event Dates: 02/21/2016 - 02/25/2016
Expo/Exhibit Dates: 02/23/2016 - 02/24/2016
Expo/Exhibit Hours: Tues, 10am-5pm, Poster Reception, 6-8pm; Wed, 10am-4pm
Classification: B2B
Primary Industry: Technology
Other Industries: Electronics, Engineering, Manufacturing, Technology
Estimated Attendance: 2,500
Audience: industry's top semiconductor suppliers, integrators, and manufacturers
Notes: Attendee Job Functions:
40% Research & Development
18% Business Development
12% Engineering & Design
11% Corporate Management
6% Project/Program Management
5% Student/Educator
4% Production/Manufacturing
4% Technical/Lab. Management
Venue: San Jose Convention Center and the San Jose Marriott*
Venue Phone: (800) 726-5673
Venue Type: Indoor - Convention Center
Official Conference Hotel:San Jose Marriott
Conference Hotel URL:
Number of Exhibitors:60 (Previous Year)
Event Square Footage:5,300
Show Owner:SPIE- The International Society for Optics and Photonics
Show Manager:Freeman
Sponsorship: Yes
Sponsorship Details: For Sponsorship opportunities, please visit

Booth Size Booth Cost   Available Amenities
Exhibiting is available. Contact Sara Burns for details.   Electricity: Yes - Unknown Price
  Water: n/a
  Generator: n/a
  Marketing Vehicles Allowed: Yes
Other Booth Sizes Available: n/a

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SPIE Advanced Lithography Exhibition 2016

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